Abstract
The paper presents a novel method for monitoring and estimating the depth of a laser-drilled hole using machine vision. Through on-line image acquisition and analysis in laser machining processes, we could simultaneously obtain correlations between the machining processes and analyzed images. Based on the machine vision method, the depths of laser-machined holes could be estimated in real time. Therefore, a low cost on-line inspection system is developed to increase productivity. All of the processing work was performed in air under standard atmospheric conditions and gas assist was used. A correlation between the cumulative size of the laser-induced plasma region and the depth of the hole is presented. The result indicates that the estimated depths of the laser-drilled holes were a linear function of the cumulative plasma size, with a high degree of confidence. This research provides a novel machine vision-based method for estimating the depths of laser-drilled holes in real time.
Highlights
The development of laser-based machining has been ongoing for a long time and is applied to all aspects of conventional industry, semiconductor manufacture, the biochemical and biomedicalSensors 2012, 12 sectors, etc
Various measuring methods and technologies have been researched for laser machining monitoring and control systems, including electromagnetic fields, electric fields, acoustics, optodynamics, and optics
The depth and the diameter of holes and the thickness of recast are investigated by optical microscopy (OM)
Summary
The development of laser-based machining has been ongoing for a long time and is applied to all aspects of conventional industry, semiconductor manufacture, the biochemical and biomedicalSensors 2012, 12 sectors, etc. The development of laser-based machining has been ongoing for a long time and is applied to all aspects of conventional industry, semiconductor manufacture, the biochemical and biomedical. Because lasers use very high energy, they have always previously been applied in conventional cutting and ablation processes. Lasers have gradually been applied to precision micromachining processes. The high energy produced by a laser makes precision control and monitoring difficult in micromachining. A laser machining system that utilizes pulse laser machining rather than continuous laser machining has been developed. A pulse laser can be controlled more accurately than a conventional continuous laser system. Various measuring methods and technologies have been researched for laser machining monitoring and control systems, including electromagnetic fields, electric fields, acoustics, optodynamics, and optics
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