Abstract
The rough surface of a aluminum cylindrical drum cut by turning tool is measured with a fast scanning method by detecting angular deflection of a laser beam. Reflection pattern from the surface extended into a large region, and contained two kinds of components of narrow and wide patterns. To detect rough surface's slope, the barycentric position of the wide pattern was measured with a PSD, and a beam diameter of 5mm on the surface was adopted. After a proportionality coefficient to convert from PSD output to the surface's slope was determined, an one-dimensional surface profile measurement of the rough surface was performed without a vibration isolator. Measurement error was estimated to be 0.27μm.
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