One-step mask patterning of micro lead zirconate titanate arrays by electrohydrodynamic atomization

Abstract

In this paper, the lead zirconate titanate microarrays were fabricated with a one-step mask patterning route via electrohydrodynamic atomization. The composite ink consisting of PZT microparticles dispersed in PZT sol was prepared for the fabrication process. The sintered composite PZT cells demonstrated the perovskite structures and the coexistence of the rhombohedral and morphotropic phase boundary, as shown from the XRD and XPS results. It was found that the discrete PZT cell showed an increase of the remanent polarization, coupled with the piezoelectric coefficient (d33) of ~110 p.m./V at remanence, which was approximately 1.5 times larger than that of the continuous films. These results could be ascribed to the increased mobility of the domain wall and the reduced clamping stress. The simplicity of the fabrication routes and the fast producing capability of electrohydrodynamic atomization shows great potentiality of producing microarrays for PZT based microelectronic devices.