One‐Step Fabrication of Nanocrystalline Nanonetwork SnO2 Gas Sensors by Integrated Multilaser Processing

Abstract

AbstractAn integrated multilaser process is developed to fabricate nanocrystalline nanonetwork SnO2 gas sensors in one integrated procedure, which combines electrodes fabrication, nanomaterials deposition, and postannealing. Interdigit electrodes are fabricated on an Au‐coated fused silica substrate using a picosecond (ps) laser, which ablates the Au coating from the back of the substrate to pattern the electrodes. A novel transmitted Ps laser deposition (TPLD) process is designed to deposit SnO2 nanonetwork on the interdigit electrodes with precise deposition area control under a close target‐to‐substrate distance. The obtained SnO2 nanonetwork is in situ postannealed by a CO2 laser to improve the crystallinity, while the nano morphology and grain size keep intact. To investigate the morphology and formation process of the nanonetwork, the microstructure of the laser‐deposited SnO2 layer is characterized. The crystallization control of CO2 laser annealing is investigated through analyzing the Raman spectrum, X‐ray diffraction (XRD) patterns, and lattice structures of the samples. By exposed to H2 atmosphere, the fabricated gas sensor is demonstrated for H2 monitoring.