Abstract
We present one-step method of fabricating hierarchical multiscale grating patterns by using holographic lithography on azobenzene thin films. In this study, we investigate the growth behavior of surface relief gratings in terms of surface morphology change regarding various optical conditions of different fringe visibility, exposure dose and polarization modes of the light interference pattern. The results reveal that different-sized diffractive gratings could be fabricated orthogonally at the same time. We also explain that these orthogonal gratings were developed through the different light-induced deformation mechanism.
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