Abstract
In this paper, a low-cost one-step nano-grating fabrication has been described which is applied in the grating-coupled excitation of Surface Plasmon Polaritons (SPPs). This technique is based on a kind of physical vapor deposition technique that is so called oblique angle deposition (OAD). Our nano-gratings fabricated at angles of deposition of 60°, 70° and 80° have been investigated by the aid of atomic force microscopy, surface plasmon resonance and measurement of optical reflectance at low incidence angle. Our results show the surface plasmon resonance coupling at different azimuth angle and the sensing ability of oblique angle deposited Cr- nano-grating to the groove distance in low angle measurement system.
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