One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

Iori Nagao, Yuma Yamamoto + Show 9 more

https://doi.org/10.1557/s43580-022-00417-w

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Journal: MRS Advances	Publication Date: Dec 5, 2022
Citations: 1

Abstract

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

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