Abstract
A one-dimensional, hybrid hydrodynamics-Boltzmann model for electron beam (e-beam) generated plasmas in argon at low pressure and a constant magnetic field is developed. The e-beam separates the plasma into two distinct regions: an ionization zone irradiated by the e-beam that creates plasma and reactive species, and a diffusive zone between the e-beam and the chamber wall, where the species diffuse toward the wall. The Boltzmann equation is solved in the ionization zone and the electron energy distribution function is used to calculate rates participating in the species and power balance equations. Comparison of model and experimental data for the radial profiles of the electron density and temperature shows a favorable agreement. All plasma parameters are sensitive to their radial location.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
