Abstract
An improved transferring process that can be used to additively fabricate a cantilever with a weight is reported. By using a poly(dimethylsiloxane) template with a cavity relief structure for the weight formation, an increase in the number of process steps was not required. A capacitive acceleration sensor was successfully manufactured using the described process. Enhanced responsiveness of the sensor was clearly shown to result from the effect of the weight. The one-batch transfer process has the potential to significantly simplify the manufacturing process of highly responsive hollow structures and could be applied in the fabrication of various microelectromechanical system sensors.
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