Abstract
On-chip integrated solenoid inductors with nanogranular FeCoTiO magnetic cores have been fabricated. Both decoupled and coupled inductors with multilayered magnetic cores were studied. For the decoupled inductor, an inductance of 14.2 nH or an equivalent inductance area density of 100nH/mm2 was obtained, which is about 14 times that of the air core inductor, and the quality factor is 7.5. For the coupled two phase inductor, an even higher peak quality factor of 17 was achieved at 300 MHz, although the coupling coefficient is only 0.04. The reason was attributed to less spike domains and more uniform uniaxial anisotropy.
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