On-chip Microfabricated High-performance Embedded Solenoid-inductors and Transformers

Abstract

Concave solenoid inductors and transformers are fabricated with a post-CMOS microfabrication process.The fabricated devices are air suspending which depresses substrate effects.The concave embedding device structures are compatible with standard integrated circuit packaging.The inductors have achieved both high qulity-factor and self-resonant frequency.The transformers have achieved high available gain within a broad frequency range.Experiments and analysis have proved reliability and stability under environment vibration and thermal expansion.The inductors and transformers implemented are suitable for applications in high performance radio-frequency integrated circuits(RFIC).