On-chip Fabry–Pérot interferometric sensors for micro-gas chromatography detection

Abstract

We fabricated and characterized on-chip Fabry–Pérot (FP) vapor sensors for the development of on-column micro-gas chromatography (μGC) detectors. The FP sensors were made by coating a thin layer of polymer on a silicon wafer. The air–polymer and polymer–silicon interfaces form an FP cavity, whose resonance wavelengths change in response to the vapor absorption/desorption, thus allowing for rapid detection and quantification of vapors. For proof-of-concept, two polymers (PDMS and SU-8) were used independently and placed in an array in a microfluidic channel, and showed different sensitivities for different vapors. A sub-nano-gram detection limit and sub-second response time were achieved, representing orders of magnitude improvement over those previously reported. This on-chip design will enable the unprecedented integration of optical vapor sensors with μGC systems.