On-Chip Arbitrary Manipulation of Single Particles by Acoustic Resonator Array.

Abstract

Effective and arbitrary manipulation of particles in liquid has attracted substantial interest. Acoustic tweezers, a new and promising tool, exhibit high biocompatibility, universality, and precision but lack arbitrariness. In this work, we report a gigahertz (GHz) bulk acoustic streaming tweezer (AST)-based micro-manipulation platform capable of efficiently translating acoustic energy to fluid kinetic energy, creating a controllable, quick-response, and stable flow field and precisely, arbitrarily, and universally manipulating a single particle to move like a microrobot. Through controlling the radio frequency signals applied on these resonators, the intensity and direction of the acoustic streaming flow can be quickly and arbitrarily adjusted. Consequently, the particle dispersed at the bottom can be arbitrarily and steadily driven along the predesigned route to the target position by the acoustic streaming drag force (ASF). We utilized four resonators cooperated as a work group to manipulate single SiO2 particles to complete nearly uniform linear motions and U-shaped motions, as well as playing billiards and exploring a maze, demonstrating the enormous potential of this GHz AST-based single-particle manipulation platform for separation, assembly, sensing, enriching, transporting, and so forth.