On-wafer calibration of a double six-port reflectometer including constants for absolute power measurements

Abstract

The complete calibration of a double six-port network analyzer includes constants for the measurement of wave ratios (S-parameters) as well as constants for absolute power level measurements for nonlinear device characterization. This paper describes how a complete set of constants can be obtained for on-wafer measurements from a complete calibration in a coaxial measurement plane and a subsequent on-wafer calibration with the minimum number of elements.