Abstract

We established the coupled dynamic model of a quartz crystal resonator carrying an array of micro-beams with tip nano-particles to study the frequency shift of QCR-beams sensors induced by nano-particles with different size and mass density. The appearance of nano-particles increases the inertia of the micro-beams and lower the system frequency unless the resonance occurs and the frequency will jump. The frequency response of QCR-microbeams sensors to nano-particles is nonlinear and much more sensitive and complicate than conventional bare QCR. By choosing appropriate micro-beams length allows the QCR-beams to approach the resonance state, the frequency shift and mass sensitivity of the composite sensor can be significantly improved, but they also change with the size and mass density of the nano-particles. The outcomes are helpful in the particle detection and characterizing using the QCR-microbeams sensor.

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