Abstract
We have newly developed an x-ray photoemission electron microscope (XPEEM) which uses both soft x-rays and hard x-rays at the undulator beam line BL15XU in the synchrotron radiation (SR) facility SPring-8 to observe various practical materials. In combination with an energy analyzer and high brilliant x-ray source, the detection of high kinetic energy inner-shell photoelectrons is essential for revealing the chemical properties of specimen subsurfaces or buried interfaces, owing to long inelastic mean free path of the high kinetic energy photoelectrons. The most significant result in our design is the new combined electric and magnetic field objective lens in which the magnetic field penetrates up to the sample surface. This allows the measurement with high spatial resolution of both low intensity images of inner-shell photoelectrons with high kinetic energy and high intensity images of secondary electrons. By using the sample bias scan method, we can easily change the focus condition of the objective len...
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