Abstract
Microwave gas discharges excited near a dielectric surface are investigated. Such discharges can exist over a broad range of gas pressures and thereby can be used to solve a wide variety of applied problems. The wave dispersion properties favorable for discharge excitation are analyzed, and a kinetic discharge model is considered that can be used to calculate the discharge parameters. A model of a steady discharge at gas pressures of 102–104 Pa is constructed.
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