Abstract
Microwave gas discharges excited near a dielectric surface are investigated. Such discharges can exist over a broad range of gas pressures and thereby can be used to solve a wide variety of applied problems. The wave dispersion properties favorable for discharge excitation are analyzed, and a kinetic discharge model is considered that can be used to calculate the discharge parameters. A model of a steady discharge at gas pressures of 102–104 Pa is constructed.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
