On the Suppression of the Backward Motion of a Piezo-Driven Precision Positioning Platform Designed by the Parasitic Motion Principle

Abstract

Piezo-driven precision positioning platforms with large stroke are greatly demanded in both scientific research and industrial applications. Although various principles have been proposed to design piezo-driven positioning platforms, the problem of backward motion commonly exists, greatly hindering their applications. To suppress the backward motion, in this paper, an idea by generating a forward frictional force to balance the reversed frictional force was proposed. Correspondingly, a specific arc-shape flexure hinge was designed to generate the forward frictional force via its elastic recovery. To verify the feasibility of the proposed idea, a positioning platform with alterable initial gap between contact surfaces is designed by the parasitic motion principle (PMP). By measuring the output displacement under various initial gaps, a critical initial gap was identified, at which the positioning platform could output stepping displacement without backward motion. Under this critical initial gap, effects of driving voltage and frequency on the backward motion are further investigated. In addition, the natural frequency and loading capacity of the positioning platform are tested. This paper confirms that using PMP, it is feasible to design piezo-driven positioning platforms with completely suppressed backward motion, which would enhance the applications of the PMP and PMP positioning platforms.