Abstract
This work presents the results of the experimental and theoretical study of the static pull-in of tilting actuation executed by a hybrid levitation micro-actuator (HLMA) based on the combination of inductive levitation and electrostatic actuation. A semi-analytical model to study such a pull-in phenomenon is developed, for the first time, as a result of using the qualitative technique based on the Lagrangian approach to analyze inductive contactless suspensions and a recent progress in the calculation of mutual inductance and force between two circular filaments. The obtained non-linear model, accounting for two degrees of freedom of the actuator, allows us to predict accurately the static pull-in displacement and voltage. The results of modeling were verified experimentally and agree well with measurements.
Highlights
IntroductionHybrid Micro-Actuator: Theory and Electromagnetic levitation micro-actuators employing remote ponderomotive forces, in order to act on a target environment or compensate a gravity force for holding stably a micro-object at the equilibrium without mechanical attachment, have already found wide applications and demonstrated a new generation of micro-sensors and -actuators with increased operational capabilities and overcoming the domination of friction over inertial forces at the micro-scale
Hybrid Micro-Actuator: Theory and Electromagnetic levitation micro-actuators employing remote ponderomotive forces, in order to act on a target environment or compensate a gravity force for holding stably a micro-object at the equilibrium without mechanical attachment, have already found wide applications and demonstrated a new generation of micro-sensors and -actuators with increased operational capabilities and overcoming the domination of friction over inertial forces at the micro-scale.There are number of techniques, which provide the implementation of electromagnetic levitation into a micro-actuator system and can be classified according to the materials used and the sources of the force fields in two major branches: electric levitation micro-actuators (ELMA) and magnetic levitation micro-actuators (MLMA)
The first circuit corresponds to the eddy current distributed along the edge of disc-shaped proof mass (PM) and the second circuit is defined by the levitation coil
Summary
Hybrid Micro-Actuator: Theory and Electromagnetic levitation micro-actuators employing remote ponderomotive forces, in order to act on a target environment or compensate a gravity force for holding stably a micro-object at the equilibrium without mechanical attachment, have already found wide applications and demonstrated a new generation of micro-sensors and -actuators with increased operational capabilities and overcoming the domination of friction over inertial forces at the micro-scale. HLMAs, in which, for instance, the inductive levitation micro-actuator system can be joined with a source of electrostatic field, dramatically increase the capabilities of levitated micro-systems [4] and demonstrate a wide range of different operation modes such as the linear and angular positioning, bi-stable linear and angular actuation and the adjustment of stiffness components, as it was reported in [17,23] and presented by the author at Transducers 2017 [24] These capabilities open a new very promising perspective to create smart micro-actuator systems with new functional abilities implemented, for instance, by means of the coherent cooperation of distributed microactuators, multistable actuation, mechanical and electromagnetic couplings.
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