Abstract
Production of a plasma that has a large degree of ionization (DOI), volume, and spatial and temporal uniformities is a challenge for the improvement of the performance of plasma-based vapor deposition processes. As a potential candidate for the discharge, we investigate plasma parameters arising in helium electron cyclotron resonance (ECR) discharges due to a simple cusp field. Two-dimensional distributions of helium atom emission-line intensities were measured using spectroscopy with multiple viewing chords and then de-convoluted by Abel inversion. The local plasma parameters, including the atomic density, were evaluated using collisional-radiative model analysis. The DOI calculated from the electron and atomic densities reached up to 35% and, in most of the region inside the ECR surface, it was more than 10%.
Highlights
A plasma produced using electron cyclotron resonance (ECR) heating under a simple cusp field could have a relatively large degree of ionization (DOI) [1,2]
We simultaneously evaluate ne and n11 S, using the helium atom (HeI) emission-line intensities and by collisional-radiative (CR) model analysis
As a result of the increased ne and decreased n11 S inside the ECR surface, the DOI increased up to 35%
Summary
A plasma produced using electron cyclotron resonance (ECR) heating under a simple cusp field could have a relatively large degree of ionization (DOI) [1,2]. We simultaneously evaluate ne and n11 S , using the helium atom (HeI) emission-line intensities and by collisional-radiative (CR) model analysis. This is becoming a standard method, owing to the recent improvements in its measurement accuracy for various types of plasma (see Reference [3] and the references therein). We previously measured a one-dimensional spatial distribution of the DOI [3,4]
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