Abstract
In this paper, the distribution of the electromagnetic field in planar coil inductive discharges in the case of small radius of the plasma vessel is studied. The role of the radius on the skin depth and the structure of the field is investigated analytically in a homogeneous plasma. The results show that in the H-mode at moderate and low plasma densities the skin depth is determined by the radius of the tube and is almost independent of the electron concentration. The importance of the E-mode excited by the radial component of the current in the coil increases with a decrease in radius. The results are confirmed by numerical models in the more complicated cases of a plasma–vacuum–metal structure and an inhomogeneous plasma. Experimental results from the phase-resolved optical emission spectroscopy method confirming the conclusion from the analytical and numerical calculations are also presented.
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