Abstract
The surface characteristics of nanodimensional LiF films deposited at different substrate temperature were investigated and scaling law analysis was performed using fractal concept. The interface width, average roughness, height–height correlation, lateral correlation length, roughness exponent and fractal dimension were determined to characterize the observed surface. The computed results show that the film deposited at higher substrate temperature has higher surface roughness, whereas the fractal analysis using height–height correlation function reveals that the value of fractal dimension decreases as the substrate temperature during deposition increases.
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