Abstract
Double frequency heating (DFH) is a tool to improve the output of highly charged ions particularly from modern electron cyclotron resonance ion source installations with very high RF-frequencies. In order to gain information on the DFH-mechanism and on the role of the lower injected frequency we have carried out a series of dedicated experiments where we have put emphasis on the creation of a discrete resonance surface also for this lower frequency. Our well-established method of inserting an emissive MD (metal-dielectric) liner into the plasma chamber of the source is used in these experiments as a tool of investigation. In this way, the electron temperature and density for both ECR zones is increased in a controlled manner, allowing conclusions on the role of the change of the electron-energy-distribution function with and without DFH.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
