Abstract
The concepts of temperature coefficient of resistance (TCR) and thermal conductance ( G th ) entail devices with uniform temperature. However, Joule heated integrated metal resistors usually feature a non-constant temperature profile. After defining an effective TCR and an effective G th , this paper describes simple relationships able to correlate these two parameters with measured quantities. These relationships are applied to the case of the heating element of a micromachined gas sensor and are exploited to derive the effective TCR and G th of the same element when a passivation layer is added on top of it. The information presented in this paper could also provide useful rules of thumb for the verification of finite element modeling simulations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
