Abstract
The study attempts to reveal the influence of the transmission function of electrostatic deflector analyzers with linear voltage scan on the shape of the LEIS energy spectra and the arising error in surface elemental composition and film thickness analysis. The practical applicability of several analytical and numerical approaches for reconstructing true energy distributions of particles is studied using examples of simulated LEIS spectra. The presented methodology can be extended to a wider range of applications involving electrostatic or magnetic analyzers of charged particles. The study proposesa freely available and ready-to-use tool for simulating distortions of spectra caused by the transmission function of spectrometers and for reconstructing true distributions of arbitrary spectra.
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