Abstract
Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.
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