On the properties of aluminium doped zinc oxide thin films deposited on plastic substrates from ceramic targets

Abstract

We report on the deposition of Al doped ZnO (AZO) thin films on unheated polyethylene terephthalate (PET) substrates by pulsed laser deposition technique using a UV excimer laser and Al2O3:ZnO ceramic targets (1.5 and 2wt% Al2O3). The deposited AZO films have been investigated by atomic force microscopy, scanning electron microscopy, X-ray diffraction, and optical spectrophotometry. Films present excellent optical and electrical properties (transmission in the visible range T>85%; resistivity at room temperature ρ=1.3×10−3Ωcm) as electrodes for plastic solar cells. A good correlation was found between deposition conditions (laser fluence) and structural, morphological, optical and electrical properties.