Abstract
We report on the deposition of Al doped ZnO (AZO) thin films on unheated polyethylene terephthalate (PET) substrates by pulsed laser deposition technique using a UV excimer laser and Al2O3:ZnO ceramic targets (1.5 and 2wt% Al2O3). The deposited AZO films have been investigated by atomic force microscopy, scanning electron microscopy, X-ray diffraction, and optical spectrophotometry. Films present excellent optical and electrical properties (transmission in the visible range T>85%; resistivity at room temperature ρ=1.3×10−3Ωcm) as electrodes for plastic solar cells. A good correlation was found between deposition conditions (laser fluence) and structural, morphological, optical and electrical properties.
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