Abstract
Negative ion formation of KrF 2 and XeF 2 was studied by using a Penning ion source with radial extraction, and the extraction of KrF − and XeF − from the ion source was confirmed by observing the mass fragmentation patterns. Improving the gas feeding system, we could have negative ion currents one order of magnitude larger than the currents reported previously. Typical yields for KrF − and XeF − were 100 nA and 50 nA, and maxima of 320 nA and 150 nA.
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