On the possibility of quantitative W-Cr-Y analysis by grazing ion-surface scattering spectroscopy

Abstract

Low-angle ion scattering spectroscopy with Ne+ 11 keV ions was provided for the W-Cr-Y self-passivating metal alloy with reduced thermo-oxidation at different stages of vacuum pre-annealing. A comparison of the element’s relative surface concentrations, obtained by the ions scattering spectroscopy, with the energy dispersive spectroscopy was provided. The simulation of the energy spectra of scattered Ne particles was performed by the SDTrimSP code. Simulated and experimental spectra were analyzed from the point of view of the accuracy of determining surface composition, as well as of existing limitations. Some patterns in the formation of the energy spectra for grazing-angle ion surface scattering case were analyzed. It was shown that impurities with low atomic number on the sample’s surface may lead to the overestimation of the Cr concentration with this technique. The high sensitivity of the technique to moderate changes in elemental composition was noted.