Abstract
ABSTRACTThe surfaces of Al2O3and AlN are modified by pulsed-laser irradiation This modification promotes the deposition of copper when the irradiated substrates are immersed in an electroless bath. In this paper the nature of the surface modification is analyzed using results from Auger Emission Spectroscopy (AES) and Cross Sectional Transmission Electron Microscopy (XTEM). During irradiation AlN thermally decomposes leaving a discontinuous metallic film on the surface. A film of Al2O3is detected at the surface of the irradiated AlN substrate, much thicker when the irradiation is performed in an oxidizing atmosphere than when done in a reducing one. Nanoparticles of metallic aluminum are generated during laser irradiation of Al2O3in a reducing atmosphere. When the irradiation of Al2O3is performed in an oxidizing atmosphere, regions containing aluminum or substoichiometric alumina are detected by AES. It is concluded that the presence of metallic aluminum is the main reason why electroless deposition can occur in both AlN and Al2O3. Deposition kinetics are completely consistent with this conclusion. It is very likely that also substoichiometric alumina helps to catalyze the electroless deposition.
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