On the Optimization of Performance and Reliability in a-InGaZnO Thin-Film Transistors by Versatile Light Shielding Design

Abstract

This work studies the effect of the location of the light shielding (LS) layer on negative bias illumination stress (NBIS) instability in self-aligned top-gate amorphous indium-gallium-zinc oxide thin-film transistors (SA-TG a-InGaZnO TFTs). Although the NBIS instability can be mitigated by introducing a fully covered LS layer, it causes an unwanted parasitic capacitance, as evidenced by capacitance–voltage ( ${C}$ – ${V}$ ) measurements. An alternative solution, in which the device that is partially covered by the LS layer at the source side, is proposed to optimize the tradeoff. This study suggests that an LS layer could be adopted in the SA-TG configuration, as it is versatile in different structural designs, depending on the requirement of targeted applications.