Abstract

This work faces the use of graphene liquid-gate transistors as sensors. Before dealing with a functionalized surface and biological targets, achieving a reliable sensing platform within this novel material as an active channel, fabrication, lithography, and reliability have to be extensively evaluated. In this work, we have analyzed the inter-device variability and the reliability of the sensors together with the phenomena which can increase these issues under operative conditions. High quality material corroboration has been evaluated through structural characterization (optical, XPS and Raman). Then photolithography and processing for liquid-gate sensor have been performed. Finally, electrical evaluation of the devices has been carried out demonstrating reliability issues and considerable inter-device variability. We propose in this work the use of integrate-coupling effect (front and back-gate simultaneously) to alleviate the inter-device variability and reliability problems.

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