Abstract
An attempt has been made to measure Mg clusters formed by the supersonic jet expansion from a heated crucible using the retarding potential technique. The experiment was performed in a typical ionized cluster beam (ICB) deposition system. With Mg deposition up to 50 Å/s on a substrate 30 cm away from the source, we failed to observe abundance of large clusters (≥100 atoms/cluster). Our numerical calculations of the cluster size distribution during supersonic jet expansion based on a step-wise cluster growth model show that for an expansion angle of 20°, large cluster formation becomes appreciable only if the stagnation pressure is larger than 10 Torr. This condition implies a deposition rate of 1000 Å/s. This deposition rate is difficult to achieve in a single chamber system without differential pumping. Our results are compared with previous reports on the metal cluster size measurement using retarding potential and other techniques.
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