Abstract

The peel test is a simple mechanical test used by microelectronics industries to measure the adhesion of thin films bonded on dielectric substrates. When the film deforms elastically during peeling, the peel force is a direct measure of the adhesive fracture energy. However, when inelastic deformation takes place, the interpretation of the experimental data is not as straightforward. A general formulation of the problem of peeling is given and solutions for metallic and polymeric films are presented. The results of the analysis reveal the effects of several parameters of the peel test, such as the mechanical properties and the thickness of the film, and provide a systematic way for the determination of the adhesive fracture energy from an experimentally measured peel force.

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