Abstract
We have investigated the influence of the Fowler–Nordheim-tunneling (FNT) measurement conditions on current voltage characteristics of stressed thin oxides. In the pre-tunneling voltage range we have studied the influence of stress condition, measurement time of the measurement equipment, sweep direction and voltage-step height of the voltage ramp. An influence of the transient and stationary stress induced leakage current on the FN current voltage characteristic could be observed, which can be explained by the trapping and detrapping of electrons using a simple energy band diagram.
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