On the importance of ions and ion-molecule reactions to plasma-surface interface reactions

Abstract

Ions are known to be key players in many plasma processes, including anisotropic etching, film deposition and surface modification. The relationship between plasma ions, film properties, and surface interactions of other plasma species is not, however, well known. Using our Imaging of Radicals Interacting with Surfaces (IRIS) technique, along with plasma ion mass spectrometry (PI-MS), and surface analysis data, we have measured the effects of ion bombardment on the surface interactions of SiF 2 in SiF 4 plasmas and of CF 2 in C 3F 8 and C 4F 8 plasmas. SiF 2 is a known product of F-atom etching of Si, and CF 2 has also been cited as a product of fluorocarbon etching of Si. With both molecules, we measure surface generation when the surface is bombarded by all the plasma species. Removal of ions from the plasma molecular beam results in a net decrease in surface generation for both molecules at all powers. Results in both systems are compared with the gas-phase ion-molecule reaction data of Armentrout and coworkers. Preliminary guided-ion beam mass spectrometry results taken in the Armentrout laboratories for the Ar + + C 3F 8 reaction system are also presented.