On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

Abstract

In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.