On the efficiency of deposited energy density for ion beam mixing processes with ions implanted during and after thin metal film deposition

Abstract

The influence of the energy density deposited in collision cascades (DED) on the efficiency of the intermixing processes across bilayer interfaces was studied. The systems under investigation were bilayers of Cu on Al (Cu/Al), Pd/Fe, Cr/Ti, Cu/Ti, W/Ti. The bilayer structures were irradiated with 6–30 keV Ar +, Kr +, Cr +, Cu +, W + ions at doses up to 8×10 16 cm −2. The value of DED varied from 0.2 to 13 eV/at. The mixing profiles were obtained by using the RBS technique. The changes of relative concentrations of the intermixed components show that for some systems the rate of interface mixing increases parallel with DED.