On the effect of the electron energy distribution on the plasmaparameters of an argon discharge: a global (volume-averaged) modelstudy

Abstract

A global (volume-averaged) model is applied to investigate theeffect of the electron energy distribution function on the plasma parametersof a high-density, low-pressure, argon discharge. The effective electrontemperature increases and the electron density decreases as the electronenergy distribution is varied from being Maxwellian to become Druyvesteynlike. The sheath voltage decreases as the electron energy distributionfunction is varied from being Maxwellian to become Druyvesteyn like for lowpressures ({<}2 mTorr) and increases for higher pressures as the electronenergy distribution function is varied. Simple global model calculationsdemonstrated that increasing the operating pressure does not necessary lead toa higher electron density if the electron energy distribution evolves fromMaxwellian to become more Druyvesteyn like as the operating gas pressure isincreased.