Abstract

Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices. We address here a recurrent question in the field: do dynamical techniques that modify the effective Q (namely parametric pumping and direct drive velocity feedback) affect the performance of said sensors? We develop analytical models of both cases, while remaining in the linear regime, and introduce noise in the system from two separate sources: thermomechanical and amplifier (read-out) noise. We observe that parametric pumping enhances the quality factor in the amplitude response, but worsens it in the phase response on the resonator. In the case of feedback, we find that Q is enhanced in both cases. Then, we establish a solution for the noisy problem with direct drive and parametric pumping simultaneously. We also find that, in the case when thermomechanical noise dominates, no benefit can be obtained from either artificial Q-enhancement technique. However, in the case when amplifier noise dominates, we surprisingly observe that a significant advantage can only be achieved using parametric pumping in the squeezing region.

Highlights

  • Resonant-based sensors are widely used in our society

  • Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices

  • The effect of parametric pumping and direct feedback on a mechanical resonator is investigated in the presence of thermomechanical noise, amplifier noise, and direct forcing

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Summary

16 September 2020

Zohreh Mohammadi, Toni L Heugel, James M L Miller, Dongsuk D Shin, Hyun-Keun Kwon, Thomas W Kenny, Ramasubramanian Chitra, Oded Zilberberg and Luis Guillermo Villanueva

Introduction
Coherent response
Phase and frequency noise comparison
Conclusion

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