On the Dynamics of Piezoelectric-Driven Stick-Slip Actuator

Abstract

Piezoelectric-driven stick-slip actuators have been drawing extensive attention for applications in the fields of scanning microscopy, micro robotics, and microsystems due to their well-defined step size and theoretically-unlimited displacement. In such an actuator, the dynamics of the end-effector displacement is of importance for its control and optimal design, yet challenging to be modeled due to the complexity involved. By taking into account the dynamics of piezoelectric element and the presliding friction acting on the end-effector, a model representative of the end-effector displacement is presented in this paper. The effectiveness of the developed model is illustrated by the experiments on the piezoelectric-driven stick-slip actuator prototyped in the authors’ lab.