On the Decreasing Mismatch-Induced Stresses in a Heterostructure During Growth of the Structure from Gas Phase

Abstract

In this paper, we introduce an approach to decrease mismatch-induced stress in a heterostructure by using radiation processing during growth from gas phase. We build a framework for the approach of the mismatch-induced stresses in the heterostructure decreasing simultaneously with an acceleration of recombination and diffusion of radiation defects in the damaged region. An analytical approach for analyzing of mass and heat transfer is also introduced. The approach gives a possibility to take into account simultaneously spatial and temporal variations of parameters of mass transfer. At the same time, the approach gives a possibility to take into account nonlinearity of considered processes.