Abstract

The present work is devoted to the investigation of structural changes accompanying the appearance of green and blue electroluminescence in thermally deposited SiO x : Tb ( x∼1) films as a result of high-temperature processing. The non-destructive optical methods, specifically, measuring transmission spectra in ultraviolet, visible, near and far IR area, and multiangle ellipsometry have been used for such a research. Analysis of the obtained experimental results allows to conclude that the annealing-stimulated structural transformations in a matrix of terbium doped silicon monoxide films occur at both microstructural and macrostructural levels and have an essential and complex influence on the film radiative performances.

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