Abstract
Theoretical results are formulated to assess the strength of the effect of self-compensation of errors in the thicknesses of layers of multilayer optical coatings. They are applicable to any method of optical monitoring of the deposition process. It is shown that considering a possible presence of a strong error self-compensation effect is of great importance for choosing a monitoring method. A comparative analysis of the results obtained to date to assess the strength of the error self-compensation effect for various types of coatings has been carried out. Moreover, a number of results were obtained for the first time directly in this work. The results obtained can be used to select the optimal method for monitoring the deposition process depending on the type of coating.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
