Abstract
AbstractThe matrix dependent relative sensitivity factor Srel(c) is considered for use in quantitative Auger analysis. It is affected by matrix dependent factors like the backscattering factor, the escape depth of Auger electrons and the number of atoms per unit volume. The backscattering factor, especially, is evaluated and possibilities of its determination are shown. Measurements of Auger intensities and of the energy distribution of backscattered electrons were carried out for this purpose on a series of CuPd and CuSb alloys, respectively. The backscattering factor thus obtained is compared with values resulting from a formula of JABLONSKI and by experimental data of SMITH and GALLON.
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