On the applicability of high frequency acoustic shear mode biosensing in view of thickness limitations set by the film resonance

Abstract

The IC-compatible thin film bulk acoustic resonator (FBAR) technology has made it possible to move the thickness excited shear mode sensing of biological layers into a new sensing regime using substantially higher operation frequencies than the conventionally used quartz crystal microbalance (QCM). The limitations of the linear range set by the film resonance using viscoelastic protein films are here for the first time addressed specifically for FBARs operating at 700 MHz up to 1.5 GHz. Two types of protein multilayer sensing were employed; one utilizing alternating layers of streptavidin and biotinated BSA and the other using stepwise cross-linking of fibrinogen with EDC/NHS activation of its carboxyl groups. In both cases the number of protein layers within the linear regime is well above the number of protein layers usually used in biosensor applications, further verifying the applicability of the FBAR as a biosensor. Theoretical calculations are also presented using well established physical models to illustrate the expected behavior of the FBAR sensor, in view of both the frequency and the dissipation shifts.