On predictive supervisory control of automation structures for semiconductor fab using factory communications and SPNs

Abstract

Activities on state dependent predictive supervisory control of stochastic discrete event dynamic systems (SDEDS), such as distributed command-and-control systems, are expected to yield significant contributions in the engineering area of optimal proactive control of factory floors. The principal idea of optimal proactive control of factory floors can be realized using multiservice networks for analysis and control of information, material, and equipment. For modeling and analysis of modern optimal proactive control of factory floors a functional analysis (FA), a performance analysis (PA), optional a structural and/or parametric sensitivity analysis (SA), and a stochastic stability analysis (SSA) of the automation structure can be utilized. A modeling, analysis, and control strategy using stochastic Petri nets (SPN) is discussed in this paper. It can be used for an operating efficiency analysis and for state dependent predictive supervisory control of SDEDS.