On opto-thermally excited parametric oscillations of microbeam resonators. I

Abstract

The present article is the first part of the work devoted to investigation of the nonlinear dynamics of parametrically excited flexural vibrations of a clamped-clamped microbeam - the basic sensitive element of a promising class of microsensors of various physical quantities - under laser thermooptical action in the form of periodically generated pulses acting on a certain part of the surface of the beam element. An analytical solution of the heat transfer problem is found for the steady harmonic distribution of temperature in the volume of the resonator. The static and dynamic components of temperature-induced axial force and bending moment are determined. Using the Galerkin method, the discretization of nonlinear coupled partial differential equations describing the longitudinal-flexural oscillations of the resonator is performed. Using the asymptotic method of multiple time-scales, an approximate analytical solution is obtained for the nonlinear dynamics problem under the conditions of primary parametric resonance.