Abstract
We summarize current trends in the analysis of physical properties (surface mass density, viscosity, elasticity, friction, and charge) of various thin films measured with a solid‐state sensor oscillating in a gaseous or liquid environment. We cover three different types of mechanically oscillating sensors: the quartz crystal microbalance with dissipation (QCM‐D) monitoring, surface acoustic wave (SAW), resonators and magnetoelastic sensors (MESs). The fourth class of novel acoustic wave (AW) mass sensors, namely thin‐film bulk acoustic resonators (TFBARs) on vibrating membranes is discussed in brief. The paper contains a survey of theoretical results and practical applications of the sensors and includes a comprehensive bibliography.
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