On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review

Marina V Voinova

doi:10.1155/2009/943125

Abstract

We summarize current trends in the analysis of physical properties (surface mass density, viscosity, elasticity, friction, and charge) of various thin films measured with a solid‐state sensor oscillating in a gaseous or liquid environment. We cover three different types of mechanically oscillating sensors: the quartz crystal microbalance with dissipation (QCM‐D) monitoring, surface acoustic wave (SAW), resonators and magnetoelastic sensors (MESs). The fourth class of novel acoustic wave (AW) mass sensors, namely thin‐film bulk acoustic resonators (TFBARs) on vibrating membranes is discussed in brief. The paper contains a survey of theoretical results and practical applications of the sensors and includes a comprehensive bibliography.

Highlights

This paper introduces readers to microelectronic sensor devices based on surface acoustic waves (SAWs-sensors, Section 2) and on bulk acoustic waves (BAWs-sensors, quartz crystal microbalance (QCM), Section 4, and thin-film bulk acoustic resonators (TFBARs, Section 5), addressing their physical principles, theory, and selected examples of practical applications
We consider the magnetic analogue of SAW resonators, the so-called magnetoelastic sensors (MESs), ribbon-like oscillators that can be successfully used for remote query sensing ofchemical or environmental changes
In the second part we provide selected examples of chemical and biological applications of the Acoustic Wave (AW)-based sensors and conclude with the outlook

Summary

Introduction

This paper introduces readers to microelectronic sensor devices based on surface acoustic waves (SAWs-sensors, Section 2) and on bulk acoustic waves (BAWs-sensors, QCM, Section 4, and thin-film bulk acoustic resonators (TFBARs, Section 5), addressing their physical principles, theory, and selected examples of practical applications. “The most widely used complex measuring instrument in science is still the balance.” (NASA, http://trs-new.jpl.nasa.gov/dspace/handle/2014/39937.) QCM-based sensors are planned to be used [4] during The European ExoMars Rover Mission, which is prepared by ESA for a launch in 2009 and is devoted to the “search for life or traces of it, and of water, as a precondition for the existence of highly complex organisms.” (ESA MISSION, http://www.esa .int/SPECIALS/ExoMars/SEM10VLPQ5F 0.html.) Another challenge is to use the quartz sensors for ecosystem observations and pollution control [5]. We consider two different types of piezoelectric resonators, namely, bulk acoustic waves (BAWs) sensors based on a thickness shear vibration mode for AT-cut quartz and surface acoustic waves (SAWs) devices with a shear horizontal (SH) mode for ST-cut quartz and Rayleigh surface wave (RSAW) sensors These devices are widely used in a gas and in liquid environments, in particular for biomolecular detection in biological fluids and immunosensor applications. In surface acoustic wave sensors, the energy is trapped near the oscillator surface, which increases the sensitivity of the device in measurements of the surface mass of thin films (see Section 2, in particular, Section 2.2)

Surface Acoustic Waves Sensors

Bulk Acoustic Waves Resonators

Viscoelasticity of Polymeric Overlayers

Thin-Film Bulk Acoustic Resonators

Selected Examples of Applications of AW Sensors