Abstract
A new self-calibration method for a precision two-dimensional (2D) stage is proposed, which can be applied effectively to on-machine condition. Using a sensor measuring absolute position of a 2D reference scale in the X-, Y-, and Θ-axis, we align the scale in three views efficiently, which are required to obtain an exact solution for a 2D error function of the stage, and higher flexibility is achieved since a sample site interval can be assigned without limitation. The feasibility and performance of the proposed method were evaluated experimentally. Error functions of the 2D stage were obtained at 9 × 9 sample sites with repeatability of 43 nm and 22 nm, when the sample site intervals were 10 mm and 0.1 mm, respectively. Two error functions of the reference scale, obtained using the readouts of the 2D stage or a laser interferometer, coincided within 89 nm and 15 nm for each sample interval.
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